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ASML commits to developing even more advanced chipmaking tools
Jos Benschop is in Japan this week as he is being recognized for his contributions to photopolymer science by the International Conference of Photopolymer Science and Technology. (Nikkei montage/Source photos by ASML and Cheng Ting-Fang)
CHENG TING-FANG
TAIPEI -- ASML, the world's largest semiconductor equipment maker, is already working to develop the next generation of cutting-edge lithography machines to serve the chip industry in the next decade, the company's executive vice president of technology told Nikkei Asia.
Jos Benschop said the Netherlands-based company and its exclusive optics partner Carl Zeiss are studying designs for machines that could print circuits with a resolution as fine as 5 nanometers in a single exposure, adding that the technology would be advanced enough to serve the industry's needs from 2035 and beyond.
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